Asahi Kasei orders Aixtron equipment for next-gen device development

October 23, 2012 // By Christoph Hammerschmidt
Japanese technology company Asahi Kasei is developing next generation arsenide-phosphide-based optoelectronic devices and antimonide-based sensor devices. In this context, the company has ordered an Aixtron Close Coupled Showerhead (CCS) 6x2-inch MOCVD system. The delivery is due in the fourth quarter of 2012.

According to an Aixtron release, Asahi Kasei chose the CCS system for its flexibility for R&D purposes combined with its ability to grow on small and large wafers. CCS-based processes can also be easily scaled-up later for volume production. Furthermore, the CCS concept also allows high yields with larger area devices. Asahi Kasei has also ordered special features for its system including an EpiTT, an ARGUS multi-channel pyrometer, and Gap Adjustment.

Through its subsidiary, Asahi Kasei Microdevices Corporation, Asahi Kasei has been developing antimonide-based magnetic sensors for some time, based on the Hall Effect. Antimonide-based sensors benefit from some unique material properties which result in the highest sensitivity compared with sensors made from other materials.