The SFC5000 Series has long-term stability that enables precise control over a wide control range of 1000:1. Its settling time is 50 msec: it uses CMOSens Technology, which combines the high-precision sensor element and the analogue and digital signal processing circuitry on a single CMOS chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The mass flow controller features both analogue and digital interfaces, enabling features such as optional multigas, gas recognition and self-test capability.
The controller operates from a standard supply voltage of 14–24 VDC. It can be used with input pressures up to 10 bar (145 psi), and it is resistant to electromagnetic interference (EMI). Due to fast reaction time of the flow chip combined with fast control algorithm and valve, inlet pressure fluctuations can be regulated in real time providing stable output flow profile. The mass flow controller features a vacuum-tight stainless steel package of the flow chip which is mounted on an aluminium or stainless steel flow body. The new SFC5000 is available with various connection options for controlling and monitoring mass flow in many different applications such as plasma etching and deposition, process automation, analytical instrumentation, medical anesthesia/ventilation equipment and other areas.