MEMS analogue surface mount accelerometers for vibration measurements

November 07, 2014 // By Graham Prophet
Silicon Designs’ Model 1510 Series is a lower cost family of analogue surface mount (LCC) MEMS variable capacitive accelerometers providing general purpose vibration measurements at OEM volumes, with excellent long-term stability, across a variety of aerospace, automotive, energy, industrial, oil & gas, and test & measurement applications.

The 1510 Series incorporates a micromachined variable capacitive sensing element and custom integrated circuit. The accelerometer produces two analogue voltages which vary proportionately according to measured acceleration levels. Series units respond to either AC or DC acceleration, with choice of either +4V differential or 0.5 to 4.5V single ended output. Both outputs read nominally at +2.5 volts (at zero acceleration).

The SDI Model 1510 Series is both nitrogen damped and hermetically sealed. Two reference voltages, +5.0 and +2.5V (nominal), are required. The output scale factor is ratiometric to the +5 VDC 6 mA (typical) reference voltage. Sensitive axis is perpendicular to the bottom of the LCC package. Units are RoHS compliant and can reliably operate over a standard temperature range of -40° to +85°C. As a MEMS-based device, the Model 1510 Series is also insensitive to temperature changes and gradients, with a signal output that is further unaffected by electromagnetic interference, and requiring no warm-up period.

Series units are available in standard measurement ranges from ±5 g to ±100 g, with corresponding nominal frequency response from 0 to 600 Hz (±5 g) to 0 to 2500 Hz (±100 g).

Silicon Designs;